Main features

Silicon carbide boat (photovoltaic grade) boasts stable structure and good thermal stability which means it can be used at high temperature without deformation. Silicon carbide boat (semiconductor grade) is high purity material with high purity matrix and silicon carbide film, which can avoid the introduction of impurities to reduce the pollution of the equipment environment during processing, and effectively improve the quality of the product.

Detailed description

Photovoltaic industry commonly used quartz boat bracket and boat whose service life is only 3-6 months due to its production process and quartz material characteristics. Silicon carbide boat bracket and boat, instead of quartz, can serve up to 5 years or more. It can significantly reduce the use of cost and maintenance and repair of production capacity loss caused by line stoppage.

Scope of application

Suitable for photovoltaic equipment, semiconductor equipment in the wafer of the key load-bearing components.

Silicon carbide boat used in semiconductor vertical furnace, mainly used in high-temperature oxidation link and high-temperature annealing link.